doi: 10.4304/jsw.7.5.1038-1044
Design and Analysis of 5-DOF Micro/nano- Positioning Stage
Abstract—This paper provided a design method for configuration synthesis of micro/nano-positioning stage with bridge-type mechanism based on graph theory. The structural characteristics of stage were discussed first. Then, these modules made up of micro/nano-positioning stage were abstracted. Thus the stage could be described with a tree-graph. According to the spanning tree theory, several possible configurations of stage were enumerated correspondingly. Subsequently, the configuration synthesis of six bridge-type mechanisms was investigated and 720 results were obtained. Rules for generating structures with symmetry were established. On the basis of this, several innovative structures were presented, and one example was chosen for further analysis. The performance of the selected stage was confirmed by finite element analysis (FEA), and a prototype of the selected stage was fabricated for performance tests. Both FEA simulation and experimental studies well validate the performance of the selected stage that is expected to be adopted in micro/nano-positioning stage. Furthermore, the result of this paper provides a practicable approach for the structural design of stage and the design method based on graph theory is effective.
Index Terms—Micropositioning, Nanopositioning, Bridgetype mechanism, Finite element analysis, Graph theory, Design method.
Cite: Chao Lin, Xinhui Cui, Kai Cheng, and Songsong Yu, "Design and Analysis of 5-DOF Micro/nano- Positioning Stage," Journal of Software vol. 7, no. 5, pp. 1038-1044, 2012.
General Information
ISSN: 1796-217X (Online)
Abbreviated Title: J. Softw.
Frequency: Quarterly
APC: 500USD
DOI: 10.17706/JSW
Editor-in-Chief: Prof. Antanas Verikas
Executive Editor: Ms. Cecilia Xie
Abstracting/ Indexing: DBLP, EBSCO,
CNKI, Google Scholar, ProQuest,
INSPEC(IET), ULRICH's Periodicals
Directory, WorldCat, etcE-mail: jsweditorialoffice@gmail.com
-
Jun 12, 2024 News!
Vol 19, No 2 has been published with online version [Click]
-
Jan 04, 2024 News!
JSW will adopt Article-by-Article Work Flow
-
Apr 01, 2024 News!
Vol 14, No 4- Vol 14, No 12 has been indexed by IET-(Inspec) [Click]
-
Apr 01, 2024 News!
Papers published in JSW Vol 18, No 1- Vol 18, No 6 have been indexed by DBLP [Click]
-
Mar 01, 2024 News!
Vol 19, No 1 has been published with online version [Click]